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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

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JOURNAL INFORMATION
Publisher AVS Science and Technology Society
Open Access NO
Quartile Q2
Citation Count 1058
P-ISSN 2166-2746
E-ISSN 2166-2754
Categories Electrical and Electronic Engineering, Materials Chemistry, Surfaces, Coatings and Films, Condensed Matter Physics
Area Chemical Engineering, Engineering, Materials Science, Physics and Astronomy
Region Northern America
Country United States
Summary

  1. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is published by AVS Science and Technology Society
  2. It is not an oppen access journal
  3. The Subject Area : Chemical Engineering; Engineering; Materials Science; Physics and Astronomy